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621.381
GAR
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GARDNER,Julian W.
MICROSENSORS MEMS AND SMART DEVICES / New York : John Wiley, 2002
xi, 503 25cm
ISBN: 047186109X
1.Microelecmechanical system650 0 2. Detectors650 0 3. Intelligen control system650 0 4.Title
00004733 (RUJUKAN)
00004734 (PINJAMAN)
00004735 (PINJAMAN)
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